四川大学匹兹堡学院

主题：Development of metadevices and the importance of nano/micromachining platform construction

主讲人：林佑昇 中山大学电子与信息工程学院副教授

时间：2023年12月25日（星期一） 12:40 – 13:40

地点：文科楼四区203

讲座摘要

Nano/Micro-electro-mechanical system (N/MEMS) technology is a miniature integrated systems comprising micro-scale mechanical components, sensors, actuators, and microelectronic circuit. These systems are typically manufactured at scales ranging from millimeter to nanometer by using micromachining processes such as photolithography, thin-film deposition, reactive ion etching (RIE), chemical etching, and various other micro/nanofabrication techniques. The advantage of N/MEMS technology lies in the miniaturization, cost-effectiveness, and high degree of integration. N/MEMS can be combined with various functionalities encompassing mechanical, optical, thermal, electrical, and magnetic elements, thereby endowing them with characteristics like high sensitivity, low power consumption, and rapid responsiveness. The fabrication process is compatible with the current standard complementary metal oxide semiconductor (CMOS) technology.

Recently, the N/MEMS devices developed by Dr. Lin’s research group provide the possibility to manually manipulate electromagnetic waves from visible light to terahertz (THz) wave. These tunable N/MEMS devices can be called “tunable metadevices”. These tunable metadevices exhibit assuredly unprecedented capabilities in the manipulation of incident electromagnetic wave, e.g., polarization, frequency, amplitude, and phase. They allow for the implementations of many traditional optical devices. Moreover, N/MEMS tuning methods can provide an ideal platform for metadevices, which is not limited by the nonlinear characteristic of natural materials and exhibits a large tuning range of resonant frequency. Here, the fruitful results in Dr. Lin’s research group for the actively tunable N/MEMS metadevices and their potential applications will be presented and summarized. Finally, Dr. Lin will share his personal experience in the importance of the construction of the key laboratory of micromachining platform.

主讲人简介

Dr. Yu-Sheng Lin received his PhD degree in Institute of Nanoengineering and Microsystems at the National Tsing Hua University (NTHU), Taiwan, China, in 2011. From 2012 to 2014, he joined the department of electrical and computer engineering (ECE) at the National University of Singapore (NUS) as a senior research fellow. Currently, he is an associate professor of School of Electronics and Information Technology at Sun Yat-Sen University (SYSU) in Guangzhou, China. Dr. Lin’s research interests include N/MEMS, metamaterials, nanophotonics, and microfluidics, for sensors, optoelectronics, and biomedical applications. He has published more than 120 SCI papers (H-index from Web of Science: 36), as well as received awards for his acclaimed research contributions, such as 2023 International Association of Advanced Materials (IAAM) Fellow, 2022 International Association of Advanced Materials (IAAM) Scientist Award, and 2021 Editor-in-Chief Choice Award of Photonics Research. Meanwhile, Dr. Lin is devoted to turning his scientific research into industry viable solutions and developed technologies of great commercial potential across varied MEMS sensor market segments.